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PAGE 65/86 



MAR 0 9 2005 Fiwawn«» 

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I PETIttON FOR EXTENSION OF TIME UNDER 37 CFR 1.1 36(a) 

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06/16/2005 SDIRETA1 00000013 051320 09773351 
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Etec Systems, Inc. 

An AppDedMateriate Company 



M/S 14110 

26460 Corporate Ave. 
Hayward.CA 94545 



May 4. 2005 
Refund Branch 

ESS- US Patentand Trademark Office 
PO Box 1450 

Alexandria, VA 22313-1450 

Dear Sir or Madam: 

Re: Deposit account number 051321 ^ ^ 

^ Monthly « - ^BSTSS^ "* 1401 ' " i 

We were also charged a service charge of $25 (fee code 
reducing our balance. 

Please refund our account the sum of $1545.00. 
Sincerely, 




Richard L Lozes 

Patent Coordinator, Etec Systems 



B3/M/2885 29:31 



MAR 0 9 2005 



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NOTICE Of APPEAL FROM THE EXAMINER TO 
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