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INTERNATIONAL SEARCH REPORT 



Inte al Application No 

PCT/IB2004/052742 



A. CLASSIFICATION OF SUBJECT MATTER 

IPC 7 H01L21/331 



According to International Patent Classification (IPC) or to both national classification and IPC 



B. FIELDS SEARCHED 



Minimum documentation searched (classification system followed by classification symbols) 

IPC 7 H01L 



Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched 



Electronic data base consulted during the international search (name of data base and, where practical, search terms used) 

EPO-Internal , INSPEC 



Category 0 


Citation of document, with indication, where appropriate, of the relevant passages 


Relevant to claim No. 


A 


WO 00/13227 A (KONINKLIJKE PHILIPS 
ELECTRONICS N.V) 9 March 2000 (2000-03-09) 
the whole document 


1-20 


A 


US 2003/020166 Al (K0ND0 MASA0 ET AL) 
30 January 2003 (2003-01-30) 
paragraph '0101! - paragraph '0108!; 
figures 2,21a-21c 


1-20 


A 


W0 02/47160 A (IHP GMBH - INNOVATIONS FOR 
HIGH PERFORMANCE MICROELECTRONICS / 
INSTITU) 13 June 2002 (2002-06-13) 
the whole document 


1-20 


A 


US 6 384 469 Bl (CHANTRE ALAIN) 
7 May 2002 (2002-05-07) 
the whole document 


1-20 



□ 



Further documents are listed in the continuation of box C. 



ID 



Patent family members are listed In annex. 



° Special categories of cited documents : 

■A 1 document defining the general state of the art which Is not 

considered to be of particular relevance 
"E" earlier document but published on or after the international 

filing date 

■[_' document which may throw doubts on priority claim(s) or 
which is cited to establish the publication date of another 
citation or other special reason (as specified) 
"O - document referring to an oral disclosure, use, exhibition or 
other means 

■P" document published prior to the international filing date but 
later than the priority date claimed 



■T' later document published after the international filing date 
or priority date and not In conflict with the application but 
cited to understand the principle or theory underlying the 
Invention 

"X" document of particular relevance; the claimed invention 
cannot be considered novel or cannot be considered to 
involve an inventive step when the document Is taken alone 

"Y" document of particular relevance; the claimed invention 

cannot be considered to involve an inventive step when the 
document Is combined with one or more other such docu- 
ments, such combination being obvious to a person skilled 
in the ait 

■&" document member of the same patent family 



Date of the actual completion of the International search 

7 March 2005 



Date of mailing of the International search report 

16/03/2005 



Name and mailing address of the ISA 

European Patent Office, P.B. 5818 Patentlaan 2 
NL-2280 HV Rljswijk 
TeL (+31-70) 340-2040, Tx. 31 651 epo nl, 
Fax: (+31-70) 340-3016 



Authorized officer 



Ball let, B 



Form PCTflSA/210 (second sheet) (January 2004) 



INTERNATIONAL SEARCH REPORT 

information on patent family members 



Inte tal Application No 

PCT/IB2004/052742 



Patent document 
cited in search report 



Publication 
date 



Patent family 
member(s) 



WO 0013227 



09-03-2000 



W0 0013227 A2 

EP 1048065 A2 

JP 2002524853 T 

US 6100152 A 



Publication 
date 



09-03-2000 
02-11-2000 
06-08-2002 
08-08-2000 



US 2003020166 


Al 


30- 


-01- 


-2003 


JP 


2002141476 A 


17-05-2002 












US 


2002053737 Al 


09-05-2002 












TW 


540153 B 


01-07-2003 












1 K 
Uo 


6UUlUjj/UO Ml 




W0 0247160 


A 


13- 


-06- 


-2002 


DE 


10061199 Al 


13-06-2002 












W0 


0247160 A2 


13-06-2002 












EP 


1342266 A2 


10-09-2003 












JP 


2004515922 T 


27-05-2004 












US 


2004209418 Al 


21-10-2004 


US 6384469 


Bl 


07- 


-05- 


-2002 


FR 


2778022 Al 


29-10-1999 












EP 


1074051 Al 


07-02-2001 












WO 


9954939 Al 


28-10-1999 












JP 


2002512452 T 


23-04-2002 



Form PCT/lSA/210 (patant family annex) (January 2004)