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Full text of "USPTO Patents Application 10826261"

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FIG.6 



PACE 17/23 • RCVD AT 8/17/2005 3:45:06 PM [Eastern Daylight rime] " SVR:USPTO-EFXRF-6/27 - DNIS:2738300 • CSID: * DURATION (mnvss): 08-3O 



. 08/17/2005 WED 15: 49 



FAX USPTO General Fax 



U8/023 



MICROMACHINE PACKAGE AND METHOD FOR MANUFACTURING THE SAME 

Application No. 10/826,261 
Inventor: SuTAO 
Replacement Sheet 




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FIG.7 



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08/17/2005 WED 15:49 FAX USPTO General Fax 12)019/0 

MICROMACHINE PACKAGE AND METHOD FOR MANUFACTURING THE SAME 

Application No. 10/826,261 
Inventor: SiiTAO 
Replacement Sheet 




PAGE 19/23 ■ RCVD AT 8/1 7/2005 3:45:06 PM [Eastern Daytight Time] ■ SVR:USPTO-EFXRF-6/27 ■ DN1S:273830© - CSID: • DURATION <mm-ss): 08-30 



USPTO General Fax 



12)020/023 



MICROMACHINE PACKAGE AND METHOD FOR MANUFACTURING THE SAME 

Application No, 10/826,26 1 
Inventor: SuTAO 
Replacement Sheet 



100 

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f .^112' ^110 



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146 



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FIG.17 



PAGE 20/23 " RCVD AT 8/17/2005 3:45:06 PM [Eastern Daylight Time} " SVR:USPTO-EFXRF-6/27 * DNIS:2738300 * CSID: ■ DURATION (mm-ss):08-30 



i^^LhJX2SS^JSSR^22Jl2^. FAX „^_ ."""* 0SPT0 General Fax 



M1CR0MACHINE PACKAGE AND METHOD FOR MANUFACTURING THE SAME 

Application No. 10/826,261 
Inventor: SuTAO 
Replacement Sheet 



500' 

\ 



522' 



YZZZZZZZZ ZZZZZZ, 




580 516 



524 



548 




546 



530 



FIG.18 



PAGE 21/23 • RCVD AT W17f20O3 3:45:06 PM tEastem Daylight Time] - SVR:USPTO-EFXRF-6/27 " DNIS:273S300 * CSID: ■ DURATION (mm-ss):08-3O